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- Ensure at zero defocus and set sample height to infinite magnification on thin amorphous material.
- Set camera length to 40cm and centre the ronchigram on the OneView camera with the PL deflectors.
Stop the OneView camera.
Ensure Cosmo software is in STEM mode and select 250nm defocus.
Press single on the Cosmo software and correct for P3, A2 and O2.
- Repeat step 5 until P3<300nm, A2<50nm and O2< 10nm.
- Press single then press run to correct for higher order aberrations.
- Iterate steps 5 to 7.
- Once aberrations converge reduce the defocus to 150 nm and repeat steps 5 to 8.
Further reduce the defocus stepwise to 25nm iterating steps 5 to 8 until required aberration values are reached.
Aberration JEOL notation 'Good' value Defocus O2 n\a 2-fold stig A2 <5nm
Coma P3 <50nm 3-fold stig A3 <50nm Spherical O4 <2um Star Q4 <2um 4-fold stig A4 <2um
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