| CL2 Aperture Size (um) | Probe Convergence Semi-angle (mrad) |
|---|---|
| 40 | 31.8 |
| 30 | 23 |
| 20 | 15.3 |
| 10 | 7.6 |
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Integrations
| CL2 Aperture Size (um) | Probe Convergence Semi-angle (mrad) |
|---|---|
| 40 | 31.8 |
| 30 | 23 |
| 20 | 15.3 |
| 10 | 7.6 |