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300keV TEM Cc and defocus per bit

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Created by gys37319 on Jul 19, 2018

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Name	HS, EL, MD, CSA
Date	15^th Dec 2016

Acc. Voltage[kV]	300
OL [v]	9.65V

Defocus per bit

Condition

STEM Corrector ON or OFF	ON
Spot-Alpha	1-L
Magnification x	x800k

Defocus per bit

[nm/bit]

0.71 [nm] / bit

Coefficient of Chromatic aberration

Condition

STEM Corrector ON or OFF	ON
Spot-Alpha	1-S
Magnification x	X1M

Coefficient of Chromatic aberration

HT	300[kV]
Cc*	1.74[mm]
Cc	2.14 [mm]

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