Name

HS, EL, MD,   CSA

Date

15th   Dec 2016

Acc. Voltage[kV]

300

OL [v]

9.65V


Defocus per bit

Condition

STEM Corrector ON or OFF

ON

Spot-Alpha

1-L

Magnification x

x800k

 

Defocus per bit

[nm/bit]

0.71  [nm] / bit



Coefficient of Chromatic aberration

Condition

STEM Corrector ON or OFF

ON

Spot-Alpha

1-S

Magnification x

X1M

 

Coefficient of Chromatic aberration

HT

300[kV]

Cc* 

1.74[mm]

Cc

2.14   [mm]