Do not attempt to do anything you have not been trained to do by ePSIC staff. |
In order to run the COSMO corrector the sample must have areas of thin amorphous material.
If sample contaminates significantly aberration correction will fail. If possible beam shower sample. |
Stop the OneView camera.
Ensure Cosmo software is in STEM mode and select 250nm defocus.
Press single on the Cosmo software and correct for P3, A2 and O2.
Further reduce the defocus stepwise to 25nm iterating steps 5 to 8 until required aberration values are reached.
Aberration | JEOL notation | 'Good' value |
---|---|---|
Defocus | O2 | n\a |
2-fold stig | A2 | <5nm |
Coma | P3 | <50nm |
3-fold stig | A3 | <50nm |
Spherical | O4 | <2um |
Star | Q4 | <2um |
4-fold stig | A4 | <2um |
JEOL notation | 'Good' value | |
---|---|---|
Defocus | O2 | n\a |
2-fold stig | A2 | <5nm |
Coma | P3 | <50nm |
3-fold stig | A3 | <50nm |
Spherical | O4 | <2um |
Star | Q4 | <2um |
4-fold stig | A4 | <2um |
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