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For step-by-step guidelines please refer to the 300 kV page. Here are the parameters at 200 kV:

TEM Centre

ePSIC Documentation > E02 Pencil Beam Alignment (200 kV) > scan mag_distortion.PNG

ePSIC Documentation > E02 Pencil Beam Alignment (200 kV) > FLC.PNG

COSMO - Pencil beam mode

ePSIC Documentation > E02 Pencil Beam Alignment (200 kV) > COSMO_NBED.PNG

Projection lend values for imaging the Probe (Imaging mode)

ePSIC Documentation > E02 Pencil Beam Alignment (200 kV) > TEM_projections_vals.PNG

Diffraction in Parallel beam TEM mode (OLS values for good roundness)

ePSIC Documentation > E02 Pencil Beam Alignment (200 kV) > TEM_Diff_OLS_1000_6000.PNG