E02 Pencil Beam Alignment (200 kV)

For step-by-step guidelines please refer to the 300 kV page. Here are the parameters for 200 kV:

TEM Centre


COSMO - Pencil beam mode


Projection optics lens values for imaging the Probe (Imaging mode)


Diffraction in Parallel beam TEM mode (OLS values for good roundness- Parallel beam condition CL3: A9BE)