60keV STEM beam current

Name

MD

Date

21-04-2017

Acc.   Voltage[kV]

60

A1[kV]

3.53

Emission   [uA]

15.0

A2   [kV]

3.54

CL   Aperture 40um

CL   Aperture 30um

CL   Aperture 20um

Spot   1 [pA]

1838

1119

414

Spot   2 [pA]

1381

875

317

Spot   3 [pA]

851

602

216.2

Spot   4 [pA]

627.7

431

155.1

Spot   5 [pA]

242.7

153

57.3

Spot   6 [pA]

141.6

89.6

33.2

Spot   7 [pA]

72.8

45.5

17.2

Spot   8 [pA]

48.5

28.3

10.8

Spot   9 [pA]

22.7

12.3

4.7

Spot   10 [pA]

9.2

4.7

1.8