60keV STEM beam current
E02
Name | MD |
Date | 21-04-2017 |
Condition
Acc. Voltage[kV] | 60 |
A1[kV] | 3.53 |
Emission [uA] | 15.0 |
A2 [kV] | 3.54 |
20 Mx MAG- 9cm CL- Alpha 3
| CL Aperture 40um | CL Aperture 30um | CL Aperture 20um |
Spot 1 [pA] | 1838 | 1119 | 414 |
Spot 2 [pA] | 1381 | 875 | 317 |
Spot 3 [pA] | 851 | 602 | 216.2 |
Spot 4 [pA] | 627.7 | 431 | 155.1 |
Spot 5 [pA] | 242.7 | 153 | 57.3 |
Spot 6 [pA] | 141.6 | 89.6 | 33.2 |
Spot 7 [pA] | 72.8 | 45.5 | 17.2 |
Spot 8 [pA] | 48.5 | 28.3 | 10.8 |
Spot 9 [pA] | 22.7 | 12.3 | 4.7 |
Spot 10 [pA] | 9.2 | 4.7 | 1.8 |