300keV TEM Cc and defocus per bit

Name

HS, EL, MD,   CSA

Date

15^th   Dec 2016

Acc. Voltage[kV]

300

OL [v]

9.65V

STEM Corrector ON or OFF

ON

Spot-Alpha

1-L

Magnification x

x800k

[nm/bit]

0.71  [nm] / bit

STEM Corrector ON or OFF

ON

Spot-Alpha

1-S

Magnification x

X1M

HT

300[kV]

Cc* 

1.74[mm]

Cc

2.14   [mm]