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15. Probe Convergence Semi-angle (E01 80kV)
15. Probe Convergence Semi-angle (E01 80kV)
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| CL2 Aperture Size (um) | Probe Convergence Semi-angle (mrad) |
|---|---|
| 40 | 30.5 |
| 30 | 22.6 |
| 20 | 14.8 |
| 10 | 7.5 |
| CL2 Aperture Size (um) | Probe Convergence Semi-angle (mrad) |
|---|---|
| 40 | 30.5 |
| 30 | 22.6 |
| 20 | 14.8 |
| 10 | 7.5 |