80keV STEM beam currents

Name

EL, MD

Date

31/01/2017

Acc.   Voltage[kV]

80   kV

A1[kV]

3.51

Emission   [uA]

15.6

A2   [kV]

4.71

CL2_2   Aperture 40um

CL2_3   Aperture 30um

CL2_4   Aperture 20um

Spot   1 [pA]

1730

1052

411.3

Spot   2 [pA]

1360.0

835.4

324.4

Spot   3 [pA]

943.0

583.5

227.9

Spot   4 [pA]

653.8

419.7

164.0

Spot   5 [pA]

253.2

155.2

60.,7

Spot   6 [pA]

129.2

85.4

35.0

Spot   7 [pA]

67.4

43.8

17.7

Spot   8 [pA]

46.5

28.3

11.0

Spot   9 [pA]

20.5

12.8

5.2

Spot   10 [pA]

8.8

5.3

1.9