/
80keV STEM beam currents
80keV STEM beam currents
Name | EL, MD |
Date | 31/01/2017 |
Condition
Acc. Voltage[kV] | 80 kV |
A1[kV] | 3.51 |
Emission [uA] | 15.6 |
A2 [kV] | 4.71 |
20MX MAG – 9 cm CL – Alpha 3
| CL2_2 Aperture 40um | CL2_3 Aperture 30um | CL2_4 Aperture 20um |
Spot 1 [pA] | 1730 | 1052 | 411.3 |
Spot 2 [pA] | 1360.0 | 835.4 | 324.4 |
Spot 3 [pA] | 943.0 | 583.5 | 227.9 |
Spot 4 [pA] | 653.8 | 419.7 | 164.0 |
Spot 5 [pA] | 253.2 | 155.2 | 60.,7 |
Spot 6 [pA] | 129.2 | 85.4 | 35.0 |
Spot 7 [pA] | 67.4 | 43.8 | 17.7 |
Spot 8 [pA] | 46.5 | 28.3 | 11.0 |
Spot 9 [pA] | 20.5 | 12.8 | 5.2 |
Spot 10 [pA] | 8.8 | 5.3 | 1.9 |